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Substance Name: Trichloroethylsilane
RN: 115-21-9

Molecular Formula

  • C2-H5-Cl3-Si

Molecular Weight

  • 163.507

Classification Codes

Classification Codes

  • Organometallic
  • Skin / Eye Irritant

Superlist Classification Code

  • Threshold Planning Quantity (TPQ) = 500 lb
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Names and Synonyms

Name of Substance

  • Trichloroethylsilane


  • 4-04-00-04227 (Beilstein Handbook Reference)
  • BRN 1361384
  • EC 204-072-6
  • EINECS 204-072-6
  • Ethyl silicon trichloride
  • Ethyl trichlorosilane
  • Ethyltrichlorosilane
  • HSDB 884
  • Silane, ethyl(trichloro)-
  • Silane, trichloroethyl-
  • Silicane, trichloroethyl-
  • Trichloroethylsilane
  • Trichloroethylsilicane
  • Trichloroethylsilicon
  • UNII-6Q81CH0W5Z

Systematic Names

  • Silane, ethyltrichloro-
  • Silane, trichloroethyl-
  • Trichloro(ethyl)silane

Superlist Names

  • Ethyltrichlorosilane [UN1196] [Flammable liquid]
  • Silane, trichloroethyl-
  • Trichloroethylsilane
  • UN1196

Registry Numbers

CAS Registry Number

  • 115-21-9


  • 6Q81CH0W5Z

System Generated Number

  • 0000115219

Structure Descriptors








Organism Test Type Route Reported Dose (Normalized Dose) Effect Source
mouse LC50 inhalation 300mg/m3/2H (300mg/m3)   Toksikologiya Novykh Promyshlennykh Khimicheskikh Veshchestv. Toxicology of New Industrial Chemical Substances. For English translation, see TNICS*. Vol. 3, Pg. 23, 1961.
rat LCLo inhalation 500ppm/4H (500ppm)   Journal of Industrial Hygiene and Toxicology. Vol. 31, Pg. 343, 1949.
rat LD50 oral 1330mg/kg (1330mg/kg)   Journal of Industrial Hygiene and Toxicology. Vol. 31, Pg. 60, 1949.
rat LDLo intraperitoneal 30mg/kg (30mg/kg)   Journal of Industrial Hygiene and Toxicology. Vol. 30, Pg. 332, 1948.

Physical Properties

Physical Property Value Units Temp (deg C) Source
Melting Point -1.06E+02 deg C   EXP
Boiling Point 100.5 deg C   EXP
log P (octanol-water) 2.500 (none)   EST
Water Solubility 485 mg/L 25 EST
Vapor Pressure 47.2 mm Hg 25 EXP
Henry's Law Constant 7.09E-03 atm-m3/mole 25 EST
Atmospheric OH Rate Constant 1.19E-12 cm3/molecule-sec 25 EST

Physical property data is provided to ChemIDplus by SRC, Inc.